NTEGRA Spectra Nanolaboratory
Fabricator: NT-MDT (http://www.ntmdt.ru/)
Studying objects’ optical properties beyond the diffraction limits by means of Scanning Near-field Optical Microscopy and the effect of local tip enhanced Raman scattering (TERS). The capability of mapping the optical properties distribution (light transmission, light scattering, light polarization, etc.) as well as carrying out Raman scattering spectroscopy with flat XY resolution up to 50 nm.
The system is capable of working in the mode of registration of spatial 3D distribution of luminescence spectrum and Raman light scattering, as well as various scanning probe microscopy modes that include nanoindentation, nanomanipulation and nanolithography.
Along with the optical observation, NTEGRA Spectra allows investigating the object with a set of SPM methods: AFM, MFM, STM, Scanning Near-field Optical Microscopy, Force spectroscopy.
At the moment the equipment is being used for studying silicon nanocrystals in dielectric matrix, as well as thin films of amorphous and of crystal silicon with thickness 5 nm.
Scanning Near-field Microscopy
Atomic force microscopy
Maximum scanning range:
XY sample scanning, um: ~ 1, 50, 100
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